Effect of carrier acceleration on response of electrostatically driven MEMS gyroscope
ZHANG Lijuan1,2, ZHANG Huabiao3, LI Xinye1, WANG Yaxue1, YU Tao1
1.School of Mechanical Engineering, Hebei University of Technology, Tianjin 300134, China;
2.College of Automotive & Transportation, Tianjin University of Technology and Education, Tianjin 300222, China;
3.School of Mechanical Engineering, Tianjin University of Commerce, Tianjin 300134, China
Abstract：Carrier movement may cause measurement errors, and even make MEMS gyroscopes inoperable. The effect of carrier movement on the response of electrostatically actuated MEMS gyroscope is studied in this paper considering the nonlinear support stiffness and the detecting electrostatic force. From the governing differential equation, it is found that only the carrier acceleration may affect the response of the system. The periodic response of the system is obtained by the harmonic balance method and residue theorem. It is shown that the carrier acceleration in the driving direction can reduce the sensitivity of the system, while the acceleration in the detecting direction affects both sensitivity and zero bias. Zero bias is proportional to the magnitude of the acceleration in the detecting direction, and this proportional relationship is independent of the magnitude of the drive voltage. As the driving voltage is small, the acceleration of carrier in the detecting direction has little effect on the sensitivity and nonlinearity. However, when the driving voltage or the acceleration in the detecting direction is large, the sensitivity of the system decreases sharply, and the nonlinearity changes dramatically.
收稿日期: 2020-07-21
出版日期: 2021-03-15
引用本文:
张利娟1, 2，张华彪3，李欣业1，王雅雪1，于涛1. 载体加速度对静电驱动微机械陀螺响应的影响分析[J]. 振动与冲击, 2021, 40(5): 55-62.
ZHANG Lijuan1,2, ZHANG Huabiao3, LI Xinye1, WANG Yaxue1, YU Tao1. Effect of carrier acceleration on response of electrostatically driven MEMS gyroscope. JOURNAL OF VIBRATION AND SHOCK, 2021, 40(5): 55-62.
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