基于PZT扭振模式的纵-弯耦合模态驻波型直线超声波电机

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摘要基于耦合振动理论设计出一种新型偏心式结构的驻波型直线超声波电机，其工作模态为包含一阶纵振成分与二阶弯振成分的耦合振动模态。与纵振和弯振的复合振动模态不同的是，本文所设计超声波电机的工作模态通过构造定子的质心偏移条件，将这两种振型成分耦合，形成定子的耦合模态。其中，二阶弯振成分由金属弹性体两端压电陶瓷的扭振模式（d15模式）激励产生，一阶纵振成分通过耦合同时产生。设计了工作于d15模式的压电陶瓷的极化以及电源激励方案，详细阐述了电机的工作原理。利用有限元分析软件对定子的结构尺寸进行了设计，并对定子进行瞬态分析以得到各驱动足的运动轨迹。制作电机的实验样机并搭建实验平台，测试了样机的频率特性、电压特性以及机械特性。

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	陆旦宏
	林秋香
	徐健乔
	蒋春容
	孙芮

关键词 ：直线型超声波电机, 耦合模态, d15模式

Abstract：Based on the coupled vibration theory, a novel standing wave linear ultrasonic motor with eccentric structure is designed. Its working mode is a coupled vibration mode including the first longitudinal vibration component and the second bending vibration component. Different from the composite mode of longitudinal vibration mode and bending vibration mode, the working mode of the linear ultrasonic motor designed in this paper couples the two vibration components into the coupled mode of the stator by constructing the condition of the centroid deviation of the stator. The second bending vibration component of the stator is excited by the d15 mode of PZT ceramics at two ends of the elastomer, and the first longitudinal vibration component is simultaneously generated by coupling. The polarization of PZT ceramics working in d15 mode and power supply excitation scheme are designed. The working principle of the motor is described in detail. The structural parameters of the stator are designed by ANSYS, and the transient analysis of the stator is carried out to obtain the trajectories of driving feet. A prototype is made, and the experimental system has been established to test the frequency characteristics, voltage characteristics and mechanical characteristics.

Key words： Linear ultrasonic motor Coupled mode d15 mode

收稿日期: 2020-08-05 出版日期: 2021-11-28

引用本文:

陆旦宏，林秋香，徐健乔，蒋春容，孙芮. 基于PZT扭振模式的纵-弯耦合模态驻波型直线超声波电机[J]. 振动与冲击, 2021, 40(22): 121-127.
LU Danhong，LIN Qiuxiang，XU Jianqiao，JIANG Chunrong，SUN Rui. Linear ultrasonic motor based on longitudinal-bending coupled modal standing wave excited by the shear vibration mode of PZT ceramics. JOURNAL OF VIBRATION AND SHOCK, 2021, 40(22): 121-127.

链接本文:

http://jvs.sjtu.edu.cn/CN/ 或 http://jvs.sjtu.edu.cn/CN/Y2021/V40/I22/121

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