1. College of Mechanical Engineering, Yanshan University, Qinhuangdao 066004, China;
2. Department of Mechanical and Electrical Engineering， Hebei Construction Material Vocational and Technical College， Qinhuangdao 066004， China
Abstract：In order to improve the detection accuracy of capacitance detection sensor, a cross microresonator was proposed. The cross microresonator was simplified to a multi-field coupling vibration model, and the dynamic equation was established considering the molecular force and electric field force. The inherent frequency and its variation law of nonlinear vibration were obtained, and the effects of different structural parameters on displacement responses were analyzed. Moreover, with electrostatic excitation-capacitance detection method, we tested the cross microresonator which was fabricated utilizing micromachining technology. In order to make the output voltage signal undoped with excitation signal, the resonator was innovatively separated into excitation end and vibration picking end with insulation tape, thus the result was more realistic and accurate. In addition, Owen AC bridge was used for detection. The results show that when the size of resonator is small, the molecular force has a great influence on nonlinear vibration of resonator. The relative errors are 4.706% and 1.971% with and without consideration of the molecular force respectively, and the calculated value is closer to measured value. Furthermore, the quality factor of cross microresonator is 105.8, and the detection signal is more obvious than traditional beam.
Key words: MEMS; nonlinear vibration; molecular force; multi-field coupling; cross resonator
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