一种非完全覆盖多镀层微圆板谐振器热弹性阻尼通用计算框架

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摘要热弹性阻尼(thermoelastic damping, TED)是决定微机械谐振器品质因子上限的关键参数之一。该研究首次提出了一种计算具有多个非完全覆盖镀层微圆板谐振器TED的通用理论框架。该解析模型可退化到完全覆盖双层微圆板TED模型，数值方法同样验证了当前模型的有效性。同时提出可用工程设计领域快速计算的简单模型，并分析了该简单模型的适用范围。最后研究了具有2个非完全镀层微圆板TED频率谱特性，发现了频率谱的三Debye峰现象。

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	杨龙飞1
	李普2
	叶一舟3
	方昱斌1

关键词 ：微机械谐振器?, 热弹性阻尼(TED), 品质因子, 热弹性理论

Abstract：Thermoelastic damping (TED) is one of the critical coefficients that determines the upper limit of the quality factor of the micromechanical resonators. This paper presents for the first time a general theoretical framework for calculating TED in circular microplate resonators partially covered with multiple coatings. The present model can be degenerated to that of fully covered bilayer cases, and the numerical method also verifies the effectiveness of the current model. At the same time, a simple model for rapid calculation in the engineering design is proposed, and the scope of application of the simple model is analyzed. Finally, the TED frequency spectra behaviors of microcircular plates with 2 coatings are studied, and three Debye peaks in the frequency spectra are found.

Key words： micro-electro-mechanical system (MEMS) resonators thermoelastic damping(TED) quality factor thermoelastity

收稿日期: 2021-08-23 出版日期: 2023-01-28

引用本文:

杨龙飞1，李普2，叶一舟3，方昱斌1. 一种非完全覆盖多镀层微圆板谐振器热弹性阻尼通用计算框架[J]. 振动与冲击, 2023, 42(2): 235-243.
YANG Longfei1,LI Pu2,YE Yizhou3,FANG Yubin1. General theoretical framework for calculating the thermoelastic damping in circular microplate resonators partially covered with multi-coating. JOURNAL OF VIBRATION AND SHOCK, 2023, 42(2): 235-243.

链接本文:

http://jvs.sjtu.edu.cn/CN/ 或 http://jvs.sjtu.edu.cn/CN/Y2023/V42/I2/235

[1] 张弛,杨晓亮,唐瑞,吴洋.微机电系统温度传感器研究进展及产业现状综述[J].科技与创新,2021(04):83-85.
ZHANG Chi, YANG Xiao-liang, TANG Rui, WU Yang. Overview of the research progress and industry status of MEMS temperature sensors[J]. Science and Technology and Innovation, 2021(04): 83-85.
[2] 宋国庆,邹向光,王万生,邵志强,王伟.压电谐振式真空传感器及真空计的发展现状及其展望[J].传感器与微系统,2020,39(08):4-8.
SONG Guo-qing, ZOU Xiang-guang, WANG Wan-sheng, SHAO Zhi-qiang, WANG Wei. The development status and prospects of piezoelectric resonant vacuum sensors and vacuum gauges[J]. Sensors and Microsystems, 2020, 39(08): 4-8.
[3] GU Bing-dong, HE Tian-hu, MA Yong-bin. Thermoelastic damping analysis in micro-beam resonators considering nonlocal strain gradient based on dual-phase-lag model[J]. International Journal of Heat and Mass Transfer,2021,180: 121771.
[4] 张文明,闫寒,彭志科,孟光.微纳机械谐振器能量耗散机理研究进展[J].科学通报,2018,62(19):2077-2093.
ZHANG Wen-ming, YAN Han, PENG Zhi-ke, Meng Guang. Research progress on the energy dissipation mechanism of micro-nano mechanical resonators[J]. Chinese Science Bulletin, 2017, 62(19): 2077-2093.
[5] YANG Jin-ling, ONO T. and ESASHI M. Energy dissipation in submicrometer thick single-crystal silicon cantilevers [J]. Journal of Microelectromechanical Systems, 2002, 11(6): 775-783.
[6] ZENER C. Internal Friction in Solids. I. Theory of Internal Friction in Reeds [J]. Physical Review, 1937, 52(3): 230-235.
[7] LIFSHITZ R, ROUKES L. Thermoelastic damping in micro-and nanomechanical systems[J]. Physical review B, 2000, 61(8): 5600.
[8] SUN Yu-xin, TOHMYOH H. Thermoelastic damping of the axisymmetric vibration of circular plate resonators [J]. Journal of Sound and Vibration, 2009, 319(1-2): 392-405.
[9] LI Pu, FANG Yyu-ming, HU Ru-fu. Thermoelastic damping in rectangular and circular microplate resonators [J]. Journal of Sound and Vibration, 2012, 331(3): 721-33.
[10] ZHOU Hong-yue, LI Pu. Nonlocal dual-phase-lagging thermoelastic damping in rectangular and circular micro/nanoplate resonators [J]. Applied Mathematical Modelling, 2021, 95: 667-87.
[11] LIU Shou-bin, SUN Yu-xin, MA Jing-xuan, et al. Theoretical analysis of thermoelastic damping in bilayered circular plate resonators with two-dimensional heat conduction [J]. International Journal of Mechanical Sciences, 2018, 135: 114-23.
[12] LI Shi-rong, MA Hang-kong. Analysis of free vibration of functionally graded material micro-plates with thermoelastic damping [J]. Archive of Applied Mechanics, 2020, 90(6): 1285-304.
[13] SANDBERG R, MøLHAVE K, BOISEN A, et al. Effect of gold coating on theQ-factor of a resonant cantilever [J]. Journal of Micromechanics and Microengineering, 2005, 15(12): 2249-53.
[14] 左万里, 黄家瀚. 双层矩形微板谐振器件中热弹性阻尼机理研究 [J]. 传感技术学报, 2019, v.32(01): 54-60.
ZUO Wan-li, HUANG Jia-han. Research on the thermoelastic damping mechanism in the double-layer rectangular microplate resonator device[J]. Journal of Transducer Technology, 2019, 32(01): 50-56.
[15] JUAREZ J G. Axisymmetric vibrations of circular plates with stepped thickness [J]. Journal of Sound and Vibration, 1973, 26(3): 411-6.
[16] ZUO Wan-li, LI Pu, ZHANG Jian-run, et al. Analytical modeling of thermoelastic damping in bilayered microplate resonators [J]. International Journal of Mechanical Sciences, 2016, 106: 128-37.
[17] GALLEGO J.A. Axisymmetric vibrations of circular plates with stepped thickness[J]. Academic Press,1973,26(3):411-416.
[18] BESTLE D, ABBAS L, RUI X. Recursive eigenvalue search algorithm for transfer matrix method of linear flexible multibody systems [J]. Multibody System Dynamics, 2014, 32(4): 429-44.
[19] TIMOSHENKO S P, WOINOWSKY-KRIEGER S. Theory of plates and shells [M]. McGraw-hill, 1959.
[20] NOWACKI W. Thermoelasticity [M]. New York: Pergamon Press, 1986.
[21] NOURMOHAMMADI Z, PRABHAKAR S, VENGALLATORE S. Thermoelastic Damping in Layered Microresonators: Critical Frequencies, Peak Values, and Rule of Mixture [J]. Journal of Microelectromechanical Systems, 2013, 22(3): 747-54.
[22] ÖZıSıK M N. Heat conduction [M]. New York: Wiley, 1993.
[23] BISHOP J, KINRA V. Elastothermodynamic damping in laminated composites [J]. International Journal of Solids and Structures, 1997, 34(9): 1075-92.