Abstract：A compound control method is developed by integrating the closed-loop force feedback and input shaping method to overcome the problem of the hysteresis and dynamic behavior in piezo-based scanning systems (PSS). The flexible mechanism and PEA are analyzed, and the dynamic model of the scanning systems is established. A force sensor and an integral controller are utilized in force feedback to directly augment the damping of the PSS. For the further control of mechanical resonance, based on the theory of minimum-acceleration trajectory planning, the time-domain input shaping method was developed. The turning sections of a scanning trajectory are replaced by smooth curves, while the linear sections are retained. The force feedback method is combined with the input shaping method to control the nonlinearity and mechanical resonance in high-speed PSS. The experimental results show that the tracking error at 50 Hz is reduced from 9.33% to 1.87% by compound control method. Compared with the open-loop displacement response, the tracking accuracy of the system is improved by about 4 times. Compared with the closed-loop control method using only force feedback, the tracking accuracy of the system is improved by about 1.6 times.
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