Abstract:The relationship between the size of differential resonator phase diagram and amplitude of the signal to be detected was verified through simulation experiment methods. The larger differential resonator phase diagram, the larger amplitude of signal on condition that all the parameter are set to the same value. The relative size of the signal amplitude was obtained from the differential resonator phase diagram. According to characteristics of differential resonator phase diagram, a new method was proposed to identify the differential resonator phase diagram. At last, equipment failure and its expansion process was discovered through analysis the data measured from factory. Its differential resonator phase diagram is identified and achieved the desired results.