Pull-in Stability of an Electrostatically ActuatedMEMS Resonant Sensor and Its Control
Huilin Shang1 Yongpeng Wen2
1. School of Mechanical Engineering, Shanghai Institute of Technology, Shanghai, 20035，China2. College of Urban Railway Transportation, Shanghai University of Engineering Science, Shanghai 201620, China
Abstract：A model of electrostatically actuated MEMS resonant sensor is considered in this paper. Basing on the theory of safe basin, we discuss dynamical pull-in instability caused by dc bias voltage and the amplitude of ac voltage in detail. The threshold of the system parameters of the dynamical pull in is obtained by the Melnikov method. The 4th Runge-Kutta and the point mapping methods are employed numerically to verify the effect of the amplitude of ac voltage on the basin of attraction of pull in of the system. It is found that the increasing of dc bias voltage may cause the pull-in phenomena, and the increasing of ac voltage may induce pull-in instability of the structure. Then the delayed position feedback is applied to reduce the pull-in instability. The numerical results verify the effectiveness of the control approach.The paper provides some potential applications for the design of electrostatically actuated resonant MEMS sensors．
2013, Vol. 32 
