Design of the micro ultrasonic worktable and measure its micro amplitude
The micro ultrasonic worktable is the key component of the machining tools on micro ultrasonic machining and micro ultrasonic vibration assisted machining, the amplitude of the micro ultrasonic worktable has significant effect on the machining precision and processing efficiency. The traditional measurement methods of amplitude can hardly measure the micro amplitude of the micro ultrasonic worktable precisely. Based on the high resolution of the precise micro three-dimensional motion worktable, a micro amplitude measurement method controlled by constant force is presented and the micro amplitude which precision is 0.1μm has been measured successfully. Theoretical design of the micro ultrasonic vibration system in the micro ultrasonic worktable is carried out in the first section of this paper. In the second section, amplitudes of the micro ultrasonic vibration system on different power are measured by the proposed method.
School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China
Abstract：The micro ultrasonic worktable is the key component of the machining tools on micro ultrasonic machining and micro ultrasonic vibration assisted machining, the amplitude of the micro ultrasonic worktable has significant effect on the machining precision and processing efficiency. The traditional measurement methods of amplitude can hardly measure the micro amplitude of the micro ultrasonic worktable precisely. Based on the high resolution of the precise micro three-dimensional motion worktable, a micro amplitude measurement method controlled by constant force is presented and the micro amplitude which precision is 0.1μm has been measured successfully. Theoretical design of the micro ultrasonic vibration system in the micro ultrasonic worktable is carried out in the first section of this paper. In the second section, amplitudes of the micro ultrasonic vibration system on different power are measured by the proposed method.
连海山，郭钟宁,张伟，何俊峰，韩睿聪. 微细超声工作台的设计与微振幅测量[J]. 振动与冲击, 2015, 34(7): 199-203.
H.S. LIAN Z.N. GUO W. ZHANG J.F. HE R.C. HAN. Design of the micro ultrasonic worktable and measure its micro amplitude. JOURNAL OF VIBRATION AND SHOCK, 2015, 34(7): 199-203.
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