Abstract：In this paper, a rotary inchworm piezoelectric motor is presented. The driving principle of the motor and the configuration design of the clamping mechamisms are analysed. Considered bending and torsion deformation of the lever amplifing beam and the long flexibility beam, the dynamic model of clamping mechamisms is established. The first eight natural frequencies and modal functions are given. The effect of structure parameters of clamp mechanisms on the natural frequencies is discussed. The test results illustrate the correctness of the theoretical analysis.
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