微薄膜多场耦合非线性振动分析

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摘要本文将微谐振压力传感器谐振薄膜简化为微薄膜多场耦合系统，给出考虑分子力作用时微薄膜多场耦合动力学方程，利用Linz Ted-Poincaré方法求得其非线性振动固有频率与振型方程，研究了分子力对薄膜非线性固有频率及自由振动的影响规律，利用微加工技术制作出谐振薄膜，利用静电激励-电容检测方法对薄膜非线性固有频率进行了测试。结果表明：当薄膜尺寸较小时，分子力对于微薄膜多场耦合非线性振动的固有频率具有较大影响。研究结果对于压力传感器进一步微型化具有指导意义。

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	付晓瑞
	党亚辉
	许立忠

关键词 ：分子力, 多场耦合, 非线性振动, MEMS

Abstract：Here, dynamic equations of a multi-field coupled micro-film were deduced considering the action of molecular forces. Utilizing Linz Ted-Poincaré method, the micro-film’s nonlinear natural frequencies and corresponding vibrational shape equation were derived. The effects of molecular forces on the micro-film’s nonlinear natural frequencies and free vibration were analyzed. A resonant film was designed and manufactured using the micro-processing technique. The method of electrostatic excitation-capacitance detection was used to measure the micro film’s nonlinear natural frequencies. The results showed that the smaller the size of the micro-film, the larger the effects of molecular forces on the micro-film’s nonlinear natural frequencies. The study results had a guiding significance for the further miniaturization of pressure sensors.

Key words： molecular force multi-field coupled nonlinear vibration MEMS

收稿日期: 2016-06-22 出版日期: 2017-11-28

引用本文:

付晓瑞,党亚辉,许立忠. 微薄膜多场耦合非线性振动分析[J]. 振动与冲击, 2017, 36(23): 51-57.
FU Xiao-rui,DANG Ya-hui,XU Li-zhong. Multi-field coupled nonlinear vibration analysis of micro-films. JOURNAL OF VIBRATION AND SHOCK, 2017, 36(23): 51-57.

链接本文:

http://jvs.sjtu.edu.cn/CN/ 或 http://jvs.sjtu.edu.cn/CN/Y2017/V36/I23/51

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