Abstract:An analytical study was carried out on the evaluation of mass sensitivity, thermoelastic damping and minimum detectable mass for resonant mass sensors of bridge configuration with axial pretension.Explicit expressions for mass sensitivity, thermoelastic damping and minimum detectable mass were derived.Proposed models were applied to examine the effect of axial pretension on the performance of mass sensors.The results of the presented study demonstrate that better device performances can be achieved by axial pretension, i.e., the presence of tensile axial stress could improve mass sensitivity, increase quality factor, and enable the mass sensor to detect ever smaller mass.
陈思宇,国凤林. 轴向拉力对微梁质量传感器精度和热弹性阻尼的影响[J]. 振动与冲击, 2020, 39(9): 112-117.
CHEN Siyu, GUO Fenglin. Effects of axial pretension on the detecting accuracy and thermoelastic damping of micro-beam resonant mass sensors. JOURNAL OF VIBRATION AND SHOCK, 2020, 39(9): 112-117.
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