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Calibration method of low frequency vibration sensor based on guideway bending correction of long stroke shaker |
YANG Ming1, CAI Chenguang2, LIU Zhihua2, WANG Ying3, 4, YANG Junjie5 |
1. College of Electrical Engineering, Guizhou University, Guiyang 550025, China;
2. National Institute of Metrology, Beijing 100029, China;
3. Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
4. University of Chinese Academy of Sciences, Beijing 100049, China;
5. College of Civil and Traffic Engineering, Beijing University of Civil Engineering and Architecture, Beijing 102612, China |
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Abstract Aiming at the effect of the bending in the long-stroke shaker’s guideway on the shaker-based low- frequency vibration sensor sensitivity magnitude calibration, the machine vision method was adopted to measure the bending. The calibration accuracy of the sensitivity magnitude was improved by establishing the correcting model to eliminate the effect of the bending. The bending measurement results show the greater load of the calibrated sensor, the greater bending, and the greater influence on the sensitivity magnitude calibration. The comparison experiments with the Earth’s graviation method demonstrate the calibration accuracy of the sensitivity magnitude with the bending correction was improved by an order of magnitude in the range from 0.04 to 2 Hz.
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Received: 18 August 2020
Published: 15 January 2022
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