压电柔顺x-y微夹持器的设计与分析

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Abstract Aiming at the performance requirements of microgrippers with high displacement amplification ratio, multiple degrees of freedom and translational clamping in the fields of micro-operation and micro-assembly, a double-leaf bridge mechanism and parallelogram mechanism are used to design a piezoelectric compliant x-y microgripper. The statics and dynamics models of the microgripper are established through the finite-element method, and the displacement amplification ratio, the natural frequency, and the output coupling ratio of the microgripper are analyzed by ANSYS Workbench software. Finally, an experimental test system is built to verify the open-loop performances of the microgripper. Experimental results show that displacement amplification ratios of the microgripper in x- and y-directions are 30.8 and 8.6, and the first resonant frequency is 123.3 Hz. If an input displacement of 10 μm is applied, the operating ranges in x- and y-directions are 0 ~ 616.6 μm and 0 ~ 51.0 μm, and the gripping force range is 0 ~ 25.8 mN. The relative errors of the x- and y-direction displacement amplification ratio and the first resonant frequency between experimental tests and simulation values are 17.9%, 19.8%, and 13.9%, respectively. Experimental results verify the feasibility of the theoretical model and simulation analysis.

Key words： microgripper compliant mechanism piezoelectric actuation multiple degrees of freedom

Received: 08 December 2020 Published: 28 May 2022

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	Articles by authors
	SONG Shuaiguan1
	YANG Yiling1
	WU Gaohua1
	ZHANG Shenting1
	WEI Yanding2

Cite this article:

SONG Shuaiguan1,YANG Yiling1,WU Gaohua1, et al. Design and analysis of a piezoelectric compliant x-y microgripper[J]. JOURNAL OF VIBRATION AND SHOCK, 2022, 41(10): 154-161.

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http://jvs.sjtu.edu.cn/EN/ OR http://jvs.sjtu.edu.cn/EN/Y2022/V41/I10/154

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