直线超声电机驱动的精密运动平台的位移分辨率

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Abstract Nanometer-accuracy stage was widely needed in the scanning tunneling microscope (STM), lithography, precision medical equipments, and so on. In the traditional driving method, large stroke and high accuracy is a pair of contradiction for precision stage. However, precision stage driving by linear ultrasonic motor (LUSM) may reconcile the problem. For linear ultrasonic motors system which has been established, influence factors to displacement resolution were studied. The possible minimum step of the stage was discussed through the dead-time theory and the start-stop experimental curve. Then, under the help of XL-80 laser interferometer, the relationships between the micro-step distance of the stage and the driving factors, such as the driving waveform, pre-pressure and driving voltage, were studied separately by experiments. The experimental results show that the displacement resolution is 25nm.

Key words： linear ultrasonic motors stage experiment displacement resolution step distance

Received: 19 December 2013 Published: 25 November 2015

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http://jvs.sjtu.edu.cn/EN/ OR http://jvs.sjtu.edu.cn/EN/Y2015/V34/I22/178

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