时滞位置反馈对一类静电微传感器的吸合不稳定的控制研究

尚慧琳1，宋书峰1，文永蓬2

Delayed position feedback control on suppressing pull-in instability of a typical electrostatically actuated microsensor

Huilin Shang 1, Shufeng Song 1, Yongpeng Wen 2

振动与冲击 . 2016, (4): 81 -86 .