蜂窝形抗冲击MEMS止挡结构的抗冲击仿真与试验研究

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摘要

为了提高微机电系统(MEMS)器件的抗冲击能力，提出了一种蜂窝形MEMS止挡结构。设计了由两层不同孔径的蜂窝孔构成的蜂窝形MEMS止挡结构，并分析建立了简化数学模型，说明了通过改变蜂窝孔径可以实现止挡结构刚度的调节。基于典型的中间质量块的双端固支梁微结构，设计了相应的蜂窝形止挡测试结构，并在ANSYS仿真软件中进行了冲击仿真计算。采用机械冲击台和霍普金森杆对实际加工出的测试结构进行了冲击验证试验。试验结果表明：设计有蜂窝形止挡结构的中间质量块的双端固支梁MEMS结构可以承受至少3.2 万g冲击。采用蜂窝形止挡设计，避免了弹性梁式止挡结构的应力集中问题，提高了MEMS结构的抗冲击能力。

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	凤瑞
	王炅
	喻磊
	郑宇
	向圆
	乔伟
	王甫

关键词 ：蜂窝形, 冲击, 微机电系统(MEMS), 止挡结构

Abstract：In order to improve the shock resistance of MEMS devices, a honeycomb micro-electro-mechanical system(MEMS) stop structure was proposed, which has two layers of honeycomb holes with different apertures.A simplified mathematical model was established.It was shown that the elastic stiffness of the stop structure could be adjusted by changing the honeycomb apertures.A honeycomb MEMS stop structure based on a typical double-end fixed beam microstructure attached with an intermediate mass was designed.The shock simulation was developed by using ANSYS software.The mechanical impact table and Hopkinson bar were used to perform shock verification experiments on the fabricated structure.The experimental results indicate that the test structure with the honeycomb stop can withstand at least 32 000g impact.Compared with the elastic beam stop structure, the honeycomb stop avoids stress concentration and improves the impact resistance of the MEMS structure.

Key words： honeycomb shock micro-electro-mechanical system(MEMS) stop structure

收稿日期: 2020-11-09 出版日期: 2021-09-28

引用本文:

凤瑞，王炅，喻磊，郑宇，向圆，乔伟，王甫. 蜂窝形抗冲击MEMS止挡结构的抗冲击仿真与试验研究[J]. 振动与冲击, 2021, 40(18): 80-85.
FENG Rui，WANG Jiong，YU Lei，ZHENG Yu，XIANG Yuan，QIAO Wei，WANG Fu. Simulation and experimental study on the impact resistance of honeycomb anti-shock MEMS stop structures. JOURNAL OF VIBRATION AND SHOCK, 2021, 40(18): 80-85.

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http://jvs.sjtu.edu.cn/CN/ 或 http://jvs.sjtu.edu.cn/CN/Y2021/V40/I18/80

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