Abstract:For micro/nano-transmission platform, flexibility of the flexible mechanism will inevitably lead to residual vibration in the case of high-speed and high acceleration. In terms of Lagrange equation, the dynamic model of the platform was set up, the first five natural frequencies were obtained. And the relationship between natural frequencies and the thickness and length of the flexible leaf were analyzed. Based on finite element method, the first six natural frequencies and shapes were simulated. The optimization model of the platform has been established, taking natural frequencies as objective function. Using modal test system, modal testing have been done for the platform before and after optimization. Through comparative analysis, the method to improve the dynamic performances of the platform was obtained. In addition, the results of modal testing show that the method is correct and effective.