Piezoelectric Bulk Acoustic Wave Solid Disk Micro Gyroscope With Rocking Mass Enhancement
ZHANG Gong 1 , ZHANG Wei-ping1, XU Zhong-xing1, WANG Ying-hai1, CHENG Yu-xiang1, TANG Jian1, GUAN Ran1, CHEN Wenyuan1
1.Shanghai Jiao Tong University Research Institute of Micro/Nano Science and Technology, National Key Laboratory of Science and Technology on Micro/Nano Fabrication Shanghai 200240
In this paper, we focus on the new type of gyroscope with a completely symmetrical disk,based on out-of-plane degenerate mode of bulk acoustic wave, is aimed at detecting angular velocity by Coriolis effect.The device combines the bulk acoustic wave drive/sense and the rocking mass is designed to enhance the driving and sensing efficiency.The structure and working principle of the gyroscope are introduced and simulation and analysis are followed. By parameter optimization,it is concluded that this type of gyroscope with proper parameters can work at bulk acoustic wave model with double antinodes and it can also detect angular velocity.After simulation analysis, we obtain its operation frequency 25172.8Hz with small frequency split 184.6Hz and the sensitivity 1.81μV/rad/s is achieved. At last ,the sample micro gyroscope is fabricated.
2014, Vol. 33 
