静电力非线性对双检测微陀螺谐振频率及灵敏度稳定性的影响

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摘要为探究如何避免静电力非线性的影响或利用高电压下的静电力非线性和微梁几何非线性对冲以实现高稳定性和高灵敏度微陀螺的设计。考虑边缘效应下的静电力非线性和刚度立方非线性同时存在时，结构参数对双检测微陀螺动力学性能的影响规律；研究表明，梳齿未交叠长度越小，直流偏置电压越大，则共振频率偏移量越大，静电力的软化效果也越显著；梳齿未交叠长度存在一阀值，大于此值时静电力非线性弱化为零且对幅值的影响存在饱和现象，利用此特性可保持灵敏度的稳定性。通过微梁几何非线性的设计和控制调节驱动刚度非线性导致的硬化特性来平衡静电力带来的软化特征，使幅频曲线呈现理想的线性状态，避免了因硬化、软化特性造成的频率失稳和振幅跳跃现象的发生，同时也获得了较高的灵敏度和稳定性。

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	郝淑英1
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	李伟雄1
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	李会杰1
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	张琪昌4
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	冯晶晶1
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	张昆鹏1
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关键词 ：边缘效应, 静电力非线性, 刚度立方非线性, 双检测微陀螺, 灵敏度

Abstract：Abstract:To avoid the influence of electrostatic forces nonlinearity，this article applied the offset of nonlinearity at high voltage and microbeam geometrical nonlinearity to achieve high stability and sensitivity in micro gyroscope’s design.Moreover, The regularities of structural parameters on the dynamic performance of the dual-detection micro-gyro were simultaneously investigated when the nonlinearity of the electrostatic force and the stiffness-cubic nonlinearity both existed under the edge effect.It was shown that the smaller comb-finger non-overlapping length and the greater the DC bias voltages, the greater resonance frequency offsets and the more obvious the effect of electrostatic force softening will be produced.There is a threshold value for non-overlapping length of comb-fingers.Above this value, the nonlinearity weakens to zero and the effect on the amplitude is saturated.This feature could maintain sensitivity’s stability of the double sense-mode micro gyroscope.The softening characteristics from the electrostatic force are balanced by microbeam’s geometrically nonlinear design and the adjustment of hardening characteristics caused by stiffness nonlinearity.The amplitude-frequency curve shows an ideal linear state.The phenomenon of frequency instability and amplitude jump caused by the hardening and softening of electrostatic force is avoided, and the micro-gyro has higher sensitivity and stability.

Key words： edge effect electrostatic force nonlinearity stiffness cubic nonlinearity double sense-mode micro gyroscope sensitivity

收稿日期: 2018-09-19 出版日期: 2020-04-15

引用本文:

郝淑英1,2,3，李伟雄1,2,3，李会杰1,2,3，张琪昌4,5，冯晶晶1,2,3，张昆鹏1,2,3. 静电力非线性对双检测微陀螺谐振频率及灵敏度稳定性的影响[J]. 振动与冲击, 2020, 39(8): 136-142.
HAO Shuying1,2,3,LI Weixiong1,2,3,LI Huijie1,2,3,ZHANG Qichang4,5,FENG Jingjing1,2,3,ZHANG Kunpeng1,2,3. Effect of electrostatic force nonlinearity on resonant frequency and sensitivity stability of double sense-mode micro gyroscopes. JOURNAL OF VIBRATION AND SHOCK, 2020, 39(8): 136-142.

链接本文:

http://jvs.sjtu.edu.cn/CN/ 或 http://jvs.sjtu.edu.cn/CN/Y2020/V39/I8/136

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