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| Dynamic calibration method of digital angular vibration sensor based on machine vision |
| LIU Wenfeng1, YANG Ming1, CAI Chenguang2, LIU Zhihua2, YANG Jing1 |
1. College of Electrical Engineering, Guizhou University, Guiyang 550025, China;
2. National Institute of Metrology, Beijing 100029, China |
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Abstract Low-frequency angular vibration sensors are widely used in the applications of inertial navigation, attitude estimation, precision control, and their sensitivity calibration accuracy are the key to determine the performance of these applications. At present, the most commonly used calibration methods are the laser interferometry and circular grating method. However, the former usually needs an expensive and complex system, and the latter only has the limited calibration frequency range and application scope, they are difficult to meet the increasing calibration demand of high-performance angular vibration sensors. The machine vision method with sub-pixel edge extraction accuracy is adopted to accurately measure the input angular excitation of low-frequency angular vibration sensors so as to achieve the reliable sensitivity calibration in a wide low-frequency range, which can ensure the accuracy and efficiency simultaneously. Compared with the laser interferometry and circular grating method, the machine vision has the similar calibration results with the laser interferometry and circular grating method in the range of 0.01-5 Hz, and their maximum relative deviations are about 0.6% and 0.4%, respectively. In addition, the maximum relative standard deviation of the calibrated sensitivity by the machine vision method in this whole range is about 0.5%.
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Received: 19 April 2022
Published: 15 July 2023
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