Modal coupled dynamics of unilateral micro-resonator under influence of thickness error
FENG Jingjing1,2, WANG Chong1,2, HAO Shuying1,2, HU Wenhua1,2, WU Mengyu1,2
1.Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, Tianjin University of Technology, Tianjin 300384, China；
2.National Demonstration Center for Experimental Mechanical and Electrical Engineering Education, Tianjin University of Technology, Tianjin 300384, China
Abstract：Microresonators manufactured by surface processing technology inevitably have processing errors, this article introduces the section parameters used to describe the changes in the upper and lower surfaces of the microbeam, based on the Euler Bernoulli beam model, the coupling vibration between the modes of the microbeam resonator under the thickness shape error is studied. The corresponding nonlinear coupling equations are obtained by Galerkin discretization and multiscale method, and the critical thresholds of coupling vibration under different section parameters are obtained. The coincidence between the theoretical solution and the numerical solution of the frequency response curve verifies that the modal coupling can effectively suppress the midpoint displacement of the micro beam; the reduction of the section parameters will promote the modal coupling within the system, restrain the midpoint displacement of the microbeam to a greater extent, and broaden the frequency response bandwidth of the system. The modal coupling resonance under different section parameters analyzed in this study has potential application value for improving the stability and rated voltage of microresonator system.
Key words: microresonator; section parameters; multiscale method; modal coupling vibration
冯晶晶1,2，王冲1,2，郝淑英1,2，胡文华1,2，吴梦玉1,2. 一类厚度误差影响下单边微谐振器模态耦合动力学研究[J]. 振动与冲击, 2022, 41(21): 325-332.
FENG Jingjing1,2, WANG Chong1,2, HAO Shuying1,2, HU Wenhua1,2, WU Mengyu1,2. Modal coupled dynamics of unilateral micro-resonator under influence of thickness error. JOURNAL OF VIBRATION AND SHOCK, 2022, 41(21): 325-332.
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