Abstract：A novel micro positioner based on piezo-electric actuators is designed. By the compensation of two piezo-electric actuators fixed along Y direction, bad influence of manufacturing and assembling error on displacement straightness of the positioner is greatly decreased. Dynamic model of the positioner is developed. A control strategy based on LQG(linear Quadratic Gaussian) controller augmented by model of noise from base structure is studied. Computer simulation indicate that motion of the positioner is decoupled and the positioner can well track reference input and work well with narrow-band stochastic interference from base structure greatly depressed.
2012, Vol. 31 
