直线超声电机驱动的精密运动平台的位移分辨率

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摘要纳米级精度的运动平台在电子隧道扫描显微镜、光刻机及精密医疗设备上有着广泛的需求。传统驱动方式中大行程和高精度一直是一对难以调和的矛盾，直线超声电机直接驱动的精密运动平台可望缓解这一问题。针对所建立的大行程直线超声电机系统研究其位移分辨率的影响因素，通过死区时间理论和启停实验曲线分析探索了运动平台所可能达到的最小步距。借助XL-80激光干涉仪，通过实验研究了驱动波形、预压力及驱动电压对平台步距的影响。位移分辨率实验结果显示，运动平台分辨率可以达到25nm。

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关键词 ：直线超声电机, 平台, 实验, 位移分辨率, 步距

Abstract：Nanometer-accuracy stage was widely needed in the scanning tunneling microscope (STM), lithography, precision medical equipments, and so on. In the traditional driving method, large stroke and high accuracy is a pair of contradiction for precision stage. However, precision stage driving by linear ultrasonic motor (LUSM) may reconcile the problem. For linear ultrasonic motors system which has been established, influence factors to displacement resolution were studied. The possible minimum step of the stage was discussed through the dead-time theory and the start-stop experimental curve. Then, under the help of XL-80 laser interferometer, the relationships between the micro-step distance of the stage and the driving factors, such as the driving waveform, pre-pressure and driving voltage, were studied separately by experiments. The experimental results show that the displacement resolution is 25nm.

Key words： linear ultrasonic motors stage experiment displacement resolution step distance

收稿日期: 2013-12-19 出版日期: 2015-11-25

引用本文:

王金鹏1，周宏平1，时运来2. 直线超声电机驱动的精密运动平台的位移分辨率[J]. 振动与冲击, 2015, 34(22): 178-182.
WANG Jin-peng 1 ZHOU Hong-ping 1 SHI Yun-lai2 . Displacement Resolution Research of Precision Stage Driving by Linear Ultrasonic Motors. JOURNAL OF VIBRATION AND SHOCK, 2015, 34(22): 178-182.

链接本文:

http://jvs.sjtu.edu.cn/CN/ 或 http://jvs.sjtu.edu.cn/CN/Y2015/V34/I22/178

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