压电式二维微定位平台的率相关迟滞建模

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振动与冲击 ›› 2020, Vol. 39 ›› Issue (6) : 104-110.

论文

压电式二维微定位平台的率相关迟滞建模

胡俊峰，何建康，杨明立

作者信息 +

Rate-dependent modeling of a piezoelectric two-dimensional micro positioning stage

HU Junfeng，HE Jiankang，YANG Mingli

Author information +

文章历史 +

摘要

为了描述压电式多维微定位平台的率相关迟滞非线性特性，提出了一种基于Hammerstein模型的建模方法。以一种二维微定位平台为对象，平台动态模型是由静态迟滞非线性部分和一个线性动态系统部分串联组成。静态非线性部分由改进的Prandtl-Ishlinskii模型描述，线性动态系统部分由外因输入自回归模型(ARX)模型描述，并给出了模型参数辨识方法。为了验证所建立的Hammerstein模型有效性，搭建了实验平台进行实验验证。实验结果表明，对平台施加不同频率电压信号，由Hammerstein模型得到的预测位移和实测位移相对误差范围为 1 %~5 %，预测位移与实测位移接近，说明所建立的模型能精确描述微定位平台的率相关迟滞特性。

Abstract

In order to describe the rate-dependent hysteresis nonlinearity of piezoelectric multi-dimensional micro-positioning stages, a modeling method was proposed based on the Hammerstein model.The dynamic model of a two-dimensional micro-positioning stage was composed of a static hysteretic nonlinear part and a linear dynamic system in series.The static nonlinear part was described by an modified Prandtl-Ishlinskii model (MPI), and the linear dynamic system was described by the autoregressive model with exogenous input (ARX).The model parameter identification method was also given out.In order to verify the validity of the Hammerstein model, an experimental platform was set up for experimental verification.The experimental results show that the relative errors between the predicted displacements derived by the Hammerstein model and measured displacements is 1 %—5 % by applying different frequency voltage signals to the stage.The predicted displacements are close to the measured displacements, which shows that the presented model can accurately describe the rate-dependent hysteresis characteristics of the micro-positioning stage.

导出引用

胡俊峰，何建康，杨明立. 压电式二维微定位平台的率相关迟滞建模[J]. 振动与冲击, 2020, 39(6): 104-110

HU Junfeng，HE Jiankang，YANG Mingli. Rate-dependent modeling of a piezoelectric two-dimensional micro positioning stage[J]. Journal of Vibration and Shock, 2020, 39(6): 104-110

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