In order to describe the rate-dependent hysteresis nonlinearity of piezoelectric multi-dimensional micro-positioning stages, a modeling method was proposed based on the Hammerstein model.The dynamic model of a two-dimensional micro-positioning stage was composed of a static hysteretic nonlinear part and a linear dynamic system in series.The static nonlinear part was described by an modified Prandtl-Ishlinskii model (MPI), and the linear dynamic system was described by the autoregressive model with exogenous input (ARX).The model parameter identification method was also given out.In order to verify the validity of the Hammerstein model, an experimental platform was set up for experimental verification.The experimental results show that the relative errors between the predicted displacements derived by the Hammerstein model and measured displacements is 1 %—5 % by applying different frequency voltage signals to the stage.The predicted displacements are close to the measured displacements, which shows that the presented model can accurately describe the rate-dependent hysteresis characteristics of the micro-positioning stage.
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