Vibration isolator can insulate or weaken vibration from the ground or load and it helps to ensure the desired ultimate precision. Therefore, vibration isolator has been widely applied in lots of subsystems which are used in the field of ultra-precision machining, inspection and optics. Among most of vibration isolators, pneumatic vibration isolator is very popular due to its high cost-effective since its natural frequency doesn’t depend on the load. Based on C. Erin’s research, this paper introduce orifice number as parameter and improve the theoretical model of air bearing through derivation. Then, Structural parameters of chamber, orifice and piston are analyzed to assist structure optimum design. Meanwhile, it is concluded that if the length of orifice and the diameter is the same, the systems consist multiple smaller orifices perform better than those with single orifice. Finally, the theoretical analysis results are verified by the experiments. The research lays foundation for in-depth study of passive and active in the future.
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