柔性臂运行过程中的振动降低了其定位和操作精度，不同控制算法时的柔性臂抑振效果也不相同。针对刚-柔-电耦合的双连杆压电柔性机械臂，提出了基于模糊自整定PID算法的柔性臂振动主动控制方法。利用MATLAB软件中的模糊工具箱，建立了有效的模糊规则，实现了PID参数在线自整定模糊控制系统的设计与仿真。与常规PID控制算法相比较，仿真及实验结果表明：两种算法均能抑制柔性机械臂的振动，但模糊自整定PID控制器具有响应快、鲁棒性好、调整方便等优点，并更好地改善了控制系统的动态性能。

The positioning and operating precision of flexible manipulator is reduced by vibration in the process of running, and vibration suppression is different when the flexible manipulator is controlled by different control algorithms. According to the two-link rigid-flexible-electric coupling piezoelectricity flexible manipulator, the active vibration control method of flexible manipulator was proposed based on the fuzzy self-tuning PID algorithm. The effective fuzzy rules were established With MATLAB fuzzy control toolbox. The design and simulation of fuzzy control system whose PID parameters was self-tuning online was realized. The conventional PID control algorithm was also compared. The simulation and experimental results showed that this two algorithms could suppress vibration of flexible manipulator, but the fuzzy self-tuning PID controller had the advantages of fast response, stronger robustness and easy adjustment, and it was better to improve the dynamic performance of control system.