超声换能器接触界面的非线性谐波

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振动与冲击 ›› 2010, Vol. 29 ›› Issue (9) : 138-141.

论文

超声换能器接触界面的非线性谐波

李战慧1，2;吴运新1;隆志力1

作者信息 +

Nonlinearity Harmonic at Contact Interface in Ultrasonic Bonding Transducer System

Li Zhanhui1,2; Wu Yunxin1; Long Zhili1

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文章历史 +

摘要

超声波在换能器中的非线性不仅引起劈刀振动的混乱而且导致芯片键合的失效，本文建立了超声波在接触界面传播的模型，并进行了数学仿真，最后在试验平台上采用多普勒测振仪测量了不同接触界面压力条件下的劈刀的振动波形，用剪切强度测试仪测试了键合强度。波形的畸变和高次谐波的产生是由于接触界面层的非线性引起的，为了保证键合强度应该将变幅杆和劈刀之间的拧紧力矩设定在一个合适的范围内，使接触界面层材料的二阶非线性系数最小。可以通过检测劈刀的高次谐波来反映超声键合的强度。

Abstract

Nonlinearity characteristic of ultrasonic transducers bonding system makes the capillary vibration chaos and bonding strength degrades. The model of ultrasonic propagation at contact interface between two solid is established. And it is simulated. The vibration velocity is measured using laser Doppler non-contact measurement. The bond strength is tested. Wave distortion and the higher order harmonic generation are arisen by nonlinearity of contact interface layer. The pre-stress should be strict with a given range in order to enhance bond strength. The higher harmonic of capillary relate to ultrasonic bond strength.

导出引用

李战慧;吴运新;隆志力. 超声换能器接触界面的非线性谐波[J]. 振动与冲击, 2010, 29(9): 138-141

Li Zhanhui;Wu Yunxin;Long Zhili. Nonlinearity Harmonic at Contact Interface in Ultrasonic Bonding Transducer System[J]. Journal of Vibration and Shock, 2010, 29(9): 138-141