多线切割机床动力学分析

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振动与冲击 ›› 2011, Vol. 30 ›› Issue (7) : 169-172.

论文

多线切割机床动力学分析

冯砚博1; 孙涛2

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Dynamic analysis of multi wire saw machine tool

FENG Yan-bo1; SUN Tao2

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文章历史 +

摘要

多线切割技术是半导体硅片加工产业中的一个新生力量，它以独特的优势迅速成为当前硅切片加工中最先进的方法。机床结构的动态性能直接关系物料的加工质量，为保证机床运行的稳定性，本文对整机动力学性能进行分析，研究机械结构的合理程度。建立本体结构三维模型后，应用有限元方法基于ANSYS软件求解模态，得到各阶固有频率和振型；运用动力学软件ADAMS分析机械系统振动特性，求得机床各关键部件的频率响应。对机构设计的正确性做出理论判断，并为进一步改进指出方向，有利于提高多线切割机的性能和提高加工质量。

Abstract

Multi wire saw is a new force in semiconductor wafer processing industry, and becomes the most advanced processing method in silicon slicing with unique advantages. The dynamic performance of machine structure directly relates to the quality of material processing. To ensure the stability of machine tool operation, dynamic performance of machine tool entity was studied and research rationality of mechanical structures. Establish the three-dimensional machine body structure model. Apply finite element method to solve modal based on ANSYS software, natural frequency and mode shapes were calculated. Analyze vibration characteristics of mechanical systems by using dynamics analysis software ADAMS. Frequency responses of key components were obtained in machine tool. Make theoretical judgment on correctness of the mechanism design, and pointed out the direction for further improvement. The results benefit of improving the design of multi wire saw and improving the slicing quality.