摇摆质量增强压电体声波固体波动圆盘微陀螺

张 弓;张卫平;许仲兴;汪濙海;成宇翔;唐健;关冉;陈文元

振动与冲击 ›› 2014, Vol. 33 ›› Issue (19) : 104-108.

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PDF(1353 KB)
振动与冲击 ›› 2014, Vol. 33 ›› Issue (19) : 104-108.
论文

摇摆质量增强压电体声波固体波动圆盘微陀螺

  • 张 弓 , 张卫平 ,许仲兴 , 汪濙海, 成宇翔, 唐健, 关冉, 陈文元
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Piezoelectric Bulk Acoustic Wave Solid Disk Micro Gyroscope With Rocking Mass Enhancement

  • ZHANG Gong 1 , ZHANG Wei-ping1, XU Zhong-xing1, WANG Ying-hai1, CHENG Yu-xiang1, TANG Jian1, GUAN Ran1, CHEN Wenyuan1
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摘要

本文提出了一种新型的摇动质量增强压电体声波固体波动圆盘微陀螺。该种陀螺,在结构上采用完全对称的圆盘式结构,在原理上,利用压电体声波的简并模态,而且摇动质量又增强体声波驱动和敏感效应,再由柯氏效应,获得输入角速度。文章介绍了结构,原理,同时又利用仿真分析,优化了参数,给出了该陀螺可有效工作在25172.8Hz的体声波二波腹模式下,频率分裂184.6Hz,具有陀螺效应,仿真得到灵敏度为1.81μV/rad/s.最后,利用MEMS技术,对微陀螺进行了实际加工,并得到了样品。

Abstract

In this paper, we focus on the new type of gyroscope with a completely symmetrical disk,based on out-of-plane degenerate mode of bulk acoustic wave, is aimed at detecting angular velocity by Coriolis effect.The device combines the bulk acoustic wave drive/sense and the rocking mass is designed to enhance the driving and sensing efficiency.The structure and working principle of the gyroscope are introduced and simulation and analysis are followed. By parameter optimization,it is concluded that this type of gyroscope with proper parameters can work at bulk acoustic wave model with double antinodes and it can also detect angular velocity.After simulation analysis, we obtain its operation frequency 25172.8Hz with small frequency split 184.6Hz and the sensitivity 1.81μV/rad/s is achieved. At last ,the sample micro gyroscope is fabricated.

关键词

压电 / 体声波 / 柯氏效应 / 灵敏度

Key words

piezoelectric / bulk acoustic wave / Coriolis effect / sensitivity

引用本文

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张 弓;张卫平;许仲兴;汪濙海;成宇翔;唐健;关冉;陈文元. 摇摆质量增强压电体声波固体波动圆盘微陀螺 [J]. 振动与冲击, 2014, 33(19): 104-108
ZHANG Gong ;ZHANG Wei-ping;XU Zhong-xing;WANG Ying-hai;CHENG Yu-xiang;TANG Jian;GUAN Ran;CHEN Wenyuan. Piezoelectric Bulk Acoustic Wave Solid Disk Micro Gyroscope With Rocking Mass Enhancement[J]. Journal of Vibration and Shock, 2014, 33(19): 104-108

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