铜表面划痕过程声发射特性

余前程;何永勇

振动与冲击 ›› 2014, Vol. 33 ›› Issue (2) : 89-92.

PDF(1423 KB)
PDF(1423 KB)
振动与冲击 ›› 2014, Vol. 33 ›› Issue (2) : 89-92.
论文

铜表面划痕过程声发射特性

  • 余前程,何永勇
作者信息 +

The acoustic emission characteristic during scratch process on copper surface

  • YU Qian-cheng,HE Yong-yong
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文章历史 +

摘要

以半导体互连材料铜为对象,研究铜表面划痕过程声发射特征,探索划痕载荷及速度对划痕过程声发射特征影响及铜表面划痕损伤机制,为基于声发射技术表征铜表面微纳尺度材料去除过程提供理论依据。研究发现,铜划痕过程主要以塑性变形为主,呈现周期变化形貌,并产生连续型声发射信号;随划痕速度的增加,信号强度增加,而载荷变化对信号影响较小;信号强度与变形体积增加速率呈指数关系。声发射信号能较好表征划痕过程。

Abstract

Acoustic Emission(AE) technique is widely used in monitoring material machining process. Scratch is an important removal mechanism during material removal, especially in precision machining. It’s valuable to research AE characteristic of scratch. Copper is semiconductor interconnect material. AE characteristic of scratch on copper surface was researched, and the effect of load and velocity on AE and copper removal mechanism during scratch were analyzed, giving theoretical support for monitoring nano- or micro-removal process on copper surface with AE. The results show: Copper deforms mainly plastically during scratch with a periodic morphology, generating continuous AE signal. Signal power increases as scratch velocity increases, while load has less effect on AE signal. Signal power has an exponential relation with the increase rate of deformed volume. The results show that AE can characterize the scratch process to some extent.



关键词

划痕 / 声发射 / / 塑性变形

Key words

scratch / acoustic emission / copper / plastic deformation

引用本文

导出引用
余前程;何永勇. 铜表面划痕过程声发射特性[J]. 振动与冲击, 2014, 33(2): 89-92
YU Qian-cheng;HE Yong-yong. The acoustic emission characteristic during scratch process on copper surface[J]. Journal of Vibration and Shock, 2014, 33(2): 89-92

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