激振底座与叠层芯片悬臂的互相作用

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振动与冲击 ›› 2014, Vol. 33 ›› Issue (22) : 97-100.

论文

激振底座与叠层芯片悬臂的互相作用

李进军韩雷

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Interaction between Exciting Base and Cantilever of Stacked Chip

LI Jin-jun HAN Lei

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文章历史 +

摘要

本文使用使用动态频率扫描对叠层芯片进行激振，双探头激光多普勒测振仪同时测量底座激振下的悬臂叠层芯片的底座和悬臂端速度，对比分析悬臂和底座的响应速度频谱，获得两悬臂与底座的相位差，分析悬臂在共振时对底座的影响，以及两悬臂的相互作用关系，能准确地得到芯片悬臂端的共振频率。

Abstract

A two-probe Laser Doppler Vibrometer(LDV) system is used for detecting the vibrations of the cantilever and the base. Compare the velocity spectrum curve of cantilever and base, acquire the dimensionless frequency response curve of the cantilever, and acquire the phase difference between the cantilever and the base, then accurately estimate the resonant frequency of the cantilever by observing the dimensionless frequency response curve and the phase difference. This paper analyzes the cantilever’s impact to the base when the cantilever is resonating, and the influence between the two cantilevers.