
扭摆式高g值微机械加速度计的设计优化与冲击校准
Optimization design and shock calibration of pendulous high-g micro-machined accelerometer
A kind of pendulous high-g micro-machined accelerometer is designed. Cruciform torsion beam is applied to reduce cross-axis sensitivity, and comb structure is used as stop and damper. The micro-structure parallels 6 sensing units to improve initial capacitance. Based on finite analysis, the micro-structure’s natural frequency is about 56 kHz with modal separation ratio more than 4. It could resist 1E5 g shock acceleration and the micro-structure’s sensitivity is 8.94E-6pF/g. The accelerometer’s fabricated by SOG technology, and its single-side initial capacitance is about 3.6pF. Measurement bandwidth of ring diode capacitance detection circuit is analyzed and high g accelerometer’s detection circuit is designed. Calibrated by Hopkinson bar, the accelerometer’s nonlinearity is 2% of 2E4 g range, and scale factor is about 24.5μV/g with 5V supply.
高g值微机械加速度计 / 扭摆式加速度计 / 检测读出电路 / 霍普金森杆 / 冲击校准 {{custom_keyword}} /
high-g micro-machined accelerometer / pendulous accelerometer / detective readout circuit / Hopkinson bar / shock calibration {{custom_keyword}} /
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