扭摆式高g值微机械加速度计的设计优化与冲击校准

陶永康;刘云峰;朱科引;董景新

振动与冲击 ›› 2015, Vol. 34 ›› Issue (1) : 53-57.

PDF(1722 KB)
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振动与冲击 ›› 2015, Vol. 34 ›› Issue (1) : 53-57.
论文

扭摆式高g值微机械加速度计的设计优化与冲击校准

  • 陶永康,刘云峰,朱科引,董景新
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Optimization design and shock calibration of pendulous high-g micro-machined accelerometer

  • TAO Yong-kang LIU Yun-feng ZHU Ke-yin DONG Jing-xin
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文章历史 +

摘要

设计实现了一种扭摆式高g值微机械加速度计。微结构采用十字形扭梁减小横向效应,摆片两侧使用梳齿结构作为止档和阻尼器,6个敏感单元并联的方式提高基础电容量。有限元仿真得到表头谐振频率约为56kHz,前两阶模态分离比大于4,高过载能力10万g,微结构灵敏度为8.94E-6pF/g,基于SOG工艺流片后单侧基础电容约为3.6pF。分析了环形二极管电容检测电路的检测带宽问题,并设计了高g值加速度计的检测电路。搭建了霍普金森杆实验系统进行高g值的冲击校准,2万g范围内非线性度2%,5V供电下标度因数约为24.5μV/g。

Abstract

A kind of pendulous high-g micro-machined accelerometer is designed. Cruciform torsion beam is applied to reduce cross-axis sensitivity, and comb structure is used as stop and damper. The micro-structure parallels 6 sensing units to improve initial capacitance. Based on finite analysis, the micro-structure’s natural frequency is about 56 kHz with modal separation ratio more than 4. It could resist 1E5 g shock acceleration and the micro-structure’s sensitivity is 8.94E-6pF/g. The accelerometer’s fabricated by SOG technology, and its single-side initial capacitance is about 3.6pF. Measurement bandwidth of ring diode capacitance detection circuit is analyzed and high g accelerometer’s detection circuit is designed. Calibrated by Hopkinson bar, the accelerometer’s nonlinearity is 2% of 2E4 g range, and scale factor is about 24.5μV/g with 5V supply.


关键词

高g值微机械加速度计 / 扭摆式加速度计 / 检测读出电路 / 霍普金森杆 / 冲击校准

Key words

high-g micro-machined accelerometer / pendulous accelerometer / detective readout circuit / Hopkinson bar / shock calibration

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陶永康;刘云峰;朱科引;董景新. 扭摆式高g值微机械加速度计的设计优化与冲击校准[J]. 振动与冲击, 2015, 34(1): 53-57
TAO Yong-kang LIU Yun-feng ZHU Ke-yin DONG Jing-xin. Optimization design and shock calibration of pendulous high-g micro-machined accelerometer[J]. Journal of Vibration and Shock, 2015, 34(1): 53-57

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