智能微位移主动隔振控制系统的研究

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振动与冲击 ›› 2015, Vol. 34 ›› Issue (13) : 211-216.

论文

智能微位移主动隔振控制系统的研究

王常松1，梁森1，韦利明2

作者信息 +

Research for the smart micro-displacement active vibration isolation system

WANG Chang-song, LIANG Sen, WEI Liming

Author information +

文章历史 +

摘要

针对精密加工设备的微位移隔振问题，设计了一种以压电陶瓷为作动器的新型智能微位移主动隔振控制系统，在NI PXI数据采集系统和BK激振器的基础上，搭建了该系统的实验平台，提出将有源噪声控制理论应用到微位移振动的主动控制中，开发了在LabVIEW软件环境下整个系统的数据采集和F-XLMS控制算法的控制程序，分别在正弦、扫频和随机激励信号下进行了微位移主动隔振实验研究，结果表明三种激励信号受控后的振动位移大幅度降低，验证了该系统对微位移主动隔振的有效性，为精密仪器、微纳米设备的微位移智能主动隔振系统设计奠定了基础。

Abstract

In order to isolate the vibration for precision instrument, a smart micro-displacement active vibration isolation system is presented in this paper, which is consisting of the PZT actuator, sensor and controller. Based on NI PXI data acquisition system and BK vibration exciter, the hardware experiment platform for micro-displacement active vibration isolation control system is built in detail. The related principles of active noise control technology are applied to the active vibration control. The data acquisition and F-XLMS control algorithm program are developed by using LabVIEW. The experiment research is carried out under sine, sweep and random excitation signal, respectively. The result verifies the validity of the micro-displacement active vibration isolation system. This investigation will provide an important theoretical foundation for the micro-displacement active vibration isolation system designing of precision instruments and micro-nano equipment.

导出引用

王常松1，梁森1，韦利明2. 智能微位移主动隔振控制系统的研究[J]. 振动与冲击, 2015, 34(13): 211-216

WANG Chang-song, LIANG Sen, WEI Liming. Research for the smart micro-displacement active vibration isolation system[J]. Journal of Vibration and Shock, 2015, 34(13): 211-216

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