压膜阻尼作用下微机械谐振器动力学分析

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振动与冲击 ›› 2015, Vol. 34 ›› Issue (17) : 124-130.

论文

压膜阻尼作用下微机械谐振器动力学分析

张琪昌，周凡森，王炜

作者信息 +

The Dynamics Characteristics Analysis of Micro-Mechanical-Resonator Under The Squeeze Film Damping

ZHANG Qi-chang，ZHOU Fan-sen，WANG Wei

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文章历史 +

摘要

静电驱动微机械谐振器由于其高频率、低功耗和小型化被广泛应用于工作在空气中和液体中的化学传感器和生物物种传感器中。对于微机械谐振器，作为表面效应的空气阻尼以及三次非线性静电刚度会显著影响器件的动态响应特性。本文通过压膜阻尼理论，探究了双端固支梁在自由振动过程中由于环境压力引起的空气阻尼和三次非线性静电刚度对微梁的运动形态、谐振响应等性能参数的影响，发现了双极板微谐振器振动特性与环境压力以及立方非线性静电刚度的关系。结果表明：环境压力的增加会使微机械谐振器的共振频率增加，振动的幅值以及共振漂移的幅度减小。微机械谐振器在小位移振动时，通过对幅频曲线的分析发现，三次非线性静电刚度会使微机械谐振器表现出或软或硬的非线性特性且不可忽略。

Abstract

Electrostatic actuated micromechanical resonators are widely used in the chemical sensor and the sensor of biological species, which work in the air or liquid, as they take advantage of high frequency, low-power consumption and small size. The air damping of the surface effect and cubic nonlinear static electricity can significantly affect the dynamic response characteristics of the micromechanical resonator. In this paper, via squeeze-film damping theory, the effects of air damping due to ambient pressures during free vibration and cubic nonlinear electrostatic force on the patterns of movement and response performance were investigated in detail. The relationship between ambient pressure and nonlinear electrostatic force are found. It indicates that the resonance frequencies of micromechanical resonator will increase with the increase of the ambient pressure, while the vibration amplitudes and the drift of the resonance will decline with the increase of the ambient pressure. And it also indicates that cubic nonlinear electrostatic force will make MEMS resonators exhibit softening or hardening nonlinear characteristics and can not to be ignore by amplitude frequency curve for small amplitude vibration.

导出引用

张琪昌，周凡森，王炜. 压膜阻尼作用下微机械谐振器动力学分析[J]. 振动与冲击, 2015, 34(17): 124-130

ZHANG Qi-chang，ZHOU Fan-sen，WANG Wei. The Dynamics Characteristics Analysis of Micro-Mechanical-Resonator Under The Squeeze Film Damping[J]. Journal of Vibration and Shock, 2015, 34(17): 124-130

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