压电微动平台的定位控制

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振动与冲击 ›› 2015, Vol. 34 ›› Issue (17) : 63-68.

论文

压电微动平台的定位控制

崔玉国, 朱耀祥, 马剑强, 方凡

作者信息 +

Position control for piezoelectric micro-positioning stage

CUI Yu-guo, ZHU Yao-xiang, MA Jian-qiang, FANG Fan

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文章历史 +

摘要

为使压电微动平台定位速度快、定位精度高，采用复合控制方法来对其进行定位控制。基于保证模型精度并使精度在整个阈值区间变化尽量均匀的要求，来使阈值最优化，进而建立了压电微动平台的迟滞模型。基于所建平台迟滞模型，设计了其前馈控制器；为抑制平台的超调，在常规数字增量式PID中引入滤波器设计了其反馈控制器；将前馈控制与PID反馈控制相结合，设计了平台的复合控制器。实验结果表明：所建平台迟滞模型仅有7个算子，且均为有效算子，在16.3 μm的最大实测位移下，模型最大误差为0.208 μm；在复合控制作用下，平台达到5 μm目标值的响应时间为0.173 s，虽慢于前馈控制，但明显快于PID反馈控制；在最大位移为17.155 μm的参考输入作用下，若不考虑传感器噪声，平台的定位误差几乎为零。

Abstract

To achieve high positioning speed and high positioning accuracy for a piezoelectric micro-positioning stage, a compound position control method was investigated. A hysteresis model of the micro-positioning stage was established. The threshold value was optimized as far as possible by considering the accuracy of the model and the uniformity of the threshold interval changes. Then a feedforward controller based on the hysteresis model was developed. In order to depress the overshoot of the stage, a PID feedback controller based on the conventional digital incremental PID and a filter was also introduced. Further, a compound controller combining the feedforward controller with the PID feedback controller was developed. The experimental results show that: The developed model has only 7 effective operators. The maximum error is 0.208 μm for a maximum measured displacement of 16.3 μm. For the compound control, the response time of the micro-positioning stage for a 5 μm desired step is 0.173 s, which is slower than that for feedforward control, but significantly faster than that for PID feedback control. Regardless of the sensor noise, the position error of the stage is nearly zero under a maximum reference displacement of 17.155 μm.

导出引用

崔玉国, 朱耀祥, 马剑强, 方凡. 压电微动平台的定位控制[J]. 振动与冲击, 2015, 34(17): 63-68

CUI Yu-guo, ZHU Yao-xiang, MA Jian-qiang, FANG Fan. Position control for piezoelectric micro-positioning stage[J]. Journal of Vibration and Shock, 2015, 34(17): 63-68

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