微细超声工作台的设计与微振幅测量

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振动与冲击 ›› 2015, Vol. 34 ›› Issue (7) : 199-203.

论文

微细超声工作台的设计与微振幅测量

微细超声工作台是微细超声加工机床与微细超声振动辅助加工机床的关键零部件，其振幅值直接影响加工精度与加工效率。传统的振幅测量方法很难准确的测出微细超声工作台的微振幅。基于精密微三维运动平台的高分辨率，提出了一种恒力控制的微振幅测量方法，成功的测量出能精确到0.1微米的微振幅。本文首先对微细超声工作台中的微细超声振动系统进行了理论设计，然后采用基于恒力控制的超声振幅测量方法，对不同功率作用下的微细超声振动系统的振幅值进行了测量。

作者信息 +

Design of the micro ultrasonic worktable and measure its micro amplitude

The micro ultrasonic worktable is the key component of the machining tools on micro ultrasonic machining and micro ultrasonic vibration assisted machining, the amplitude of the micro ultrasonic worktable has significant effect on the machining precision and processing efficiency. The traditional measurement methods of amplitude can hardly measure the micro amplitude of the micro ultrasonic worktable precisely. Based on the high resolution of the precise micro three-dimensional motion worktable, a micro amplitude measurement method controlled by constant force is presented and the micro amplitude which precision is 0.1μm has been measured successfully. Theoretical design of the micro ultrasonic vibration system in the micro ultrasonic worktable is carried out in the first section of this paper. In the second section, amplitudes of the micro ultrasonic vibration system on different power are measured by the proposed method.

Author information +

文章历史 +

摘要

微细超声工作台是微细超声加工机床与微细超声振动辅助加工机床的关键零部件，其振幅值直接影响加工精度与加工效率。传统的振幅测量方法很难准确的测出微细超声工作台的微振幅。基于精密微三维运动平台的高分辨率，提出了一种恒力控制的微振幅测量方法，成功的测量出能精确到0.1微米的微振幅。本文首先对微细超声工作台中的微细超声振动系统进行了理论设计，然后采用基于恒力控制的超声振幅测量方法，对不同功率作用下的微细超声振动系统的振幅值进行了测量。

Abstract

The micro ultrasonic worktable is the key component of the machining tools on micro ultrasonic machining and micro ultrasonic vibration assisted machining, the amplitude of the micro ultrasonic worktable has significant effect on the machining precision and processing efficiency. The traditional measurement methods of amplitude can hardly measure the micro amplitude of the micro ultrasonic worktable precisely. Based on the high resolution of the precise micro three-dimensional motion worktable, a micro amplitude measurement method controlled by constant force is presented and the micro amplitude which precision is 0.1μm has been measured successfully. Theoretical design of the micro ultrasonic vibration system in the micro ultrasonic worktable is carried out in the first section of this paper. In the second section, amplitudes of the micro ultrasonic vibration system on different power are measured by the proposed method.

导出引用

连海山，郭钟宁,张伟，何俊峰，韩睿聪. 微细超声工作台的设计与微振幅测量[J]. 振动与冲击, 2015, 34(7): 199-203

H.S. LIAN Z.N. GUO W. ZHANG J.F. HE R.C. HAN. Design of the micro ultrasonic worktable and measure its micro amplitude[J]. Journal of Vibration and Shock, 2015, 34(7): 199-203

参考文献

[1]Hu, X., Z. Yu, et al. State-of-the-art review of micro ultrasonic machining. International Conference on Manufacturing Science and Engineering, MSEC 2006, October 8, 2006-October 11, 2006,Ypsilanti, MI, United states, American Society of Mechanical Engineers.
[2]Egashira, K. and T. Masuzawa. Microultrasonic Machining by the Application of Workpiece Vibration. CIRP Annals - Manufacturing Technology, 1999. 48(1): p. 131-134.
[3] 贾宝贤等.微细孔超声加工关键技术[J].机械工程学报, 2007. 43(11): p. 212-216.
   Jia Baoxian, Bian Wenfeng, et al. key technologies in ultrasonic machining micro holes[J]. Chinese journal of mechanical engineering, 2007. 43(11): p. 212-216.
[4] 杨晓辉与增泽隆.采用工件加振方式的微细超声加工特性的研究.电加工与模具, 2000.
Yang Xiaohui and Takahisa Masuzawa. Study on micro ultrasonic machining characteristics by the application of workpiece vibration. Electromachining & Mould, 2000.
[5] 王丹,赵万生等.微晶云母陶瓷微细孔超声加工正交试验.上海交通大学学报, 2010. (01):p. 46-50+55.
   WANG Dan, ZHAO Wan-sheng, et al. Orthogonal Testing Experimental on Micro Ultrasonic Machining of Microcrystalline Mica Ceramic. Journal of shanghai jiaotong university, 2010. (01):p. 46-50+55.
[6] Zheng, H. and H. Huang. Ultrasonic vibration-assisted femtosecond laser machining of microholes.Journal of Micromechanics and Microengineering, 2007. 17(8): N58.
[7] Yang, I., M.S. Park, et al. Micro ECM with ultrasonic vibrations using a semi-cylindrical tool. International Journal of Precision Engineering and Manufacturing, 2009. 10(2):5-10.
[8]H. Lian, Z. Guo, et al. Experimental Research of
Al6061 on Ultrasonic Vibration Assisted Micro- milling. Seventeenth International Symposium on Electromachining, 2013. (6):562-565.
[9] 孙利民. 振动测试技术. 郑州大学出版社,2004. 15-17.
    Sun limin. Vibration testing technology. Zhengzhou University press, 2004. 15-17.
[10] 冯冬菊,赵福令,徐占国等. 超声波数控加工中工具振幅的简易测量. 电加工与模具，2004.（5）：32-35.
    Feng Dongju, et al. A simple measurement of tool amplitude for ultrasonic CNC machining. Electromachining & Mould, 2004. （5）：32-35.
[11] 王春艳,秦永左,白素平. 超声波加工工件振幅检测系统原理及部分信号处理电路. 长春光学精密机械学院学报,2000. 23（1）：63-66.
    Wang Chunyan, et al. Principle of the system for ultrasonic amplitude detection and signal processing circuit. Journal Changchun Institute of Optics and Fine Mechanics, 2000. 23（1）：63-66.
[12] 孙渝生. 激光多普勒测量技术及其应用. 上海科学技术文献出版社,1995. 5:1-3,206-210.
     Sun yusheng. Laser Doppler measurement technology and its applications. Shanghai Science and Technology Literature, 1995. 5:1-3,206-210.
[13] 张文伟,庄葆华,张吉华. 一种基于光三角法的激光测振仪. 光电工程,1999. 26（3）：53-57.
    Zhang Wenwei, et al. A kind of laser vibrometer based on optical triangulation. Opto-Electronic Engineering, 1999. 26（3）：53-57.
[14] 郑书友,徐西鹏. 功率超声工具振幅测量方法比较. 振动与冲击,2008. 27（7）：178-181.
    Zheng Shuyou, Xu Xipeng. Comparison of amplitude measurement method on power ultrasonic tools. Journal of vibration and chock, 2008. 27（7）：178-181.