时滞控制下的微梳状驱动器动力学研究

张琪昌,任环,韩建鑫

振动与冲击 ›› 2016, Vol. 35 ›› Issue (18) : 40-45.

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PDF(1428 KB)
振动与冲击 ›› 2016, Vol. 35 ›› Issue (18) : 40-45.
论文

时滞控制下的微梳状驱动器动力学研究

  • 张琪昌,任环,韩建鑫
作者信息 +

Nonlinear Dynamics of Folded-MEMS Comb Drive Resonators with time–delayed control

  • ZHANG Qi-chang ,REN Huan ,HAN Jian-xin
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摘要

在微梳状驱动器的直、交流两种驱动电压中,加入时滞速度反馈,建立了时滞影响下的微梳状驱动器的单自由度模型。假设驱动器以微小振幅振动,将含速度时滞反馈的静电驱动力进行泰勒近似展开,应用多尺度法得到时滞参数影响下系统的幅频响应方程。驱动频率在共振频率附近时,系统非线性振动随时滞参数改变时发生跳跃现象。不同的直流电压等物理参数状态下的系统振动频率和软硬特性不同,可以通过改变时滞参数控制不同物理参数下的系统的振动的稳定范围和幅值。经过计算并使用数值方法验证了结论,正时滞参数引起系统振动失稳,负时滞参数可使振动幅值跳跃现象消失。

Abstract

Time-delayed velocity feedback is taken into consideration in the DC and AC driving voltage of the folded-MEMS comb drive resonators and the single degree of freedom model of the folded-MEMS comb drive resonators under the influence of time-delayed control is presented. This paper feedback from the velocity with small vibration amplitude to the electricity driving force and approximate the expression with the Taylor expansion. The method of multiple-scales is used to obtain the amplitude-frequency response equation of the system under the influence of time-delay parameters. The change of time-delayed parameter in the system nonlinear resonance result in jumping phenomena when the driving frequency is in the vicinity of resonance frequency. The resonance frequency and nonlinear characteristics of softening or hardening vary under conditions with different physical parameters such as DC and AC voltage. Stability region and vibration amplitude of the system with different physical parameters can be controlled by changing the time-delay parameters. The conclusion that the positive time-delayed control gain make the system instable and the negative time-delayed control gain lead to the disappearance of jumping phenomena is verified by the computation with numerical method.
 

关键词

微梳状结构;时滞反馈;控制;非线性振动 

Key words

folded-MEMS comb / time-delayed velocity feedback / control / nonlinear vibration

引用本文

导出引用
张琪昌,任环,韩建鑫. 时滞控制下的微梳状驱动器动力学研究[J]. 振动与冲击, 2016, 35(18): 40-45
ZHANG Qi-chang,REN Huan,HAN Jian-xin. Nonlinear Dynamics of Folded-MEMS Comb Drive Resonators with time–delayed control[J]. Journal of Vibration and Shock, 2016, 35(18): 40-45

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