本文利用空气弹簧低频减振特性良好的特点，提出了一种用于微振动控制的主动隔振单元，并利用该隔振单元构建了6自由度减振平台系统，建立了系统的运动微分方程式，并对系统在最优控制下的性能进行了仿真和实验研究，结果表明：所提出的主动隔振单元构建的减振平台减振效果高达了20dB左右，不仅对中高频扰力具有良好的隔振效果, 而且对低频和超低频扰力能进行有效的隔振，对精密制造和测量具有很重要的意义。

By virtue of the characteristics of good low frequency isolation performance of air springs, an active vibration isolation unit for micro vibration control was proposed. A vibration absorber platform system with six degrees of freedom was constructed by using the active vibration isolation unit, the differential equation of motion of the system was established, and the system isolation performance under optimum control was studied by simulations and experiments. The results show that the vibration reduction effect of the vibration absorber system with the proposed active vibration isolation unit is up to about 20 dB, and the system has good isolation effect not only on high frequency disturbance forces, but also on low and superlow frequency disturbance forces, which is important for the precision manufacture and measurement.