静电力非线性对双检测微陀螺谐振频率及灵敏度稳定性的影响
郝淑英1,2,3,李伟雄1,2,3,李会杰1,2,3,张琪昌4,5,冯晶晶1,2,3,张昆鹏1,2,3
振动与冲击 ›› 2020, Vol. 39 ›› Issue (8) : 136-142.
静电力非线性对双检测微陀螺谐振频率及灵敏度稳定性的影响
Effect of electrostatic force nonlinearity on resonant frequency and sensitivity stability of double sense-mode micro gyroscopes
边缘效应 / 静电力非线性 / 刚度立方非线性 / 双检测微陀螺 / 灵敏度 {{custom_keyword}} /
edge effect / electrostatic force nonlinearity / stiffness cubic nonlinearity / double sense-mode micro gyroscope / sensitivity {{custom_keyword}} /
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