空间敏感载荷用超精密驱动系统刚柔耦合振动分析

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振动与冲击 ›› 2021, Vol. 40 ›› Issue (17) : 99-105.

论文

孙小庆1，杨斌堂2，柏转1，忽伟3

作者信息 +

Rigid-flexible coupled vibration analysis of ultra-precision drive system for space sensitive load

SUN Xiaoqing1, YANG Bintang2, BAI Zhuan1, HU Wei 3

Author information +

文章历史 +

摘要

作为实现空间敏感载荷精密定位的关键部件，超精密驱动系统不仅需要具备亚毫米级的输出行程，同时还应达到微纳米级的分辨精度。提出了一种利用柔顺放大机构与智能材料作动器联合驱动的方案。对柔顺放大机构在传动过程中可能因微振动而影响输出精度的问题，利用伪刚体模型法、假设模态法和拉格朗日方程构建了柔顺放大机构的刚柔耦合动力学模型；并基于该模型仿真研究了作动频带内柔顺放大机构的动力学响应特性。结果表明：随着驱动频率的增加，放大机构弹性振动加剧；但在整个作动频带内，弹性振动与刚体运动的幅值比在5 Hz驱动频率下仅为061%；进一步结合试验测试证明了所设计的驱动系统可以忽略柔顺放大机构产生的弹性振动的结论，表明该驱动系统具备超精密定位的潜力。

Abstract

As the key component to realize precise positioning of space sensitive load, the ultra-precision drive system should not only have the output stroke of sub-millimeter level, but also achieve the resolution accuracy of micro-nano level.Here, a joint driving scheme with compliant amplifying mechanism and intelligent material actuator was proposed.In order to solve the problem of output accuracy of compliant amplifying mechanism being possible to be affected by micro-vibration in transmission process, the rigid-flexible coupled dynamic model of compliant magnifying mechanism was established by using the pseudo rigid body model method, the assumed mode method and Lagrange equation.Based on the built model, dynamic response characteristics of compliant amplifying mechanism within actuating frequency band were simulated.The results showed that elastic vibration of the amplifying mechanism increases with increase in driving frequency; in the whole actuating frequency band, the amplitude ratio of elastic vibration to rigid body motion is only 0.61% at the driving frequency of 5 Hz; the further experimental results reveal the proposed drive system can ignore elastic vibration caused by compliant amplifying mechanism, so the proposed drive system has the potential of ultra-precision positioning.

导出引用

孙小庆，杨斌堂，柏转，忽伟. 空间敏感载荷用超精密驱动系统刚柔耦合振动分析[J]. 振动与冲击, 2021, 40(17): 99-105

SUN Xiaoqing, YANG Bintang, BAI Zhuan, HU Wei . Rigid-flexible coupled vibration analysis of ultra-precision drive system for space sensitive load[J]. Journal of Vibration and Shock, 2021, 40(17): 99-105

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