针对智能制造行业里压电式传感器的动态性能校准问题，介绍了针对传感器动态力参数的相关方法和脉冲力法校准装置，在装置上完成了试验验证和分析。本文介绍了两种常规的动态力校准方法，针对不同的校准方法建立了运动方程，做出了差异性分析。然后介绍了一种基于绝对法测量的压电式传感器脉冲力法校准装置，装置的结构包括基于刚体碰撞的脉冲力发生装置和基于外差式迈克尔逊干涉仪的测量系统，说明了工作原理和解算方法。最后利用建立的校准装置对典型压电式传感器进行动态力校准，进行结果分析和可靠性验证。
Abstract
In intelligent manufacturing dynamic performance of piezoelectric sensor calibration problem, this paper introduces the relevant methods for dynamic force sensor parameters and pulse force method calibration device, the device to complete the test and analysis in this paper, two kinds of conventional dynamic force calibration method, the equation of motion is set up for different calibration method, the variance analysis and then introduces a method based on absolute measuring pulse force method of piezoelectric sensor calibration device, the device structure including pulse generator based on rigid body collision and based on heterodyne Michelson interferometer measurement system, illustrates the working principle of the reconciliation to calculate method Finally, the dynamic force calibration of typical piezoelectric sensors is carried out by using the established calibration device, and the results are analyzed and the reliability is verified.
关键词
压电式传感器 /
校准 /
动态性能 /
脉冲力 /
绝对法
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Key words
Piezoelectric sensors /
Calibration /
Dynamic performance /
Impulse force /
Absolute method
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