针对微操作和微装配领域对微夹持器高位移放大比、多自由度和平动夹持的性能需求，采用双叶型桥式机构和平行四边形机构，设计了一种压电柔顺x-y微夹持器。利用有限元方法建立了微夹持器的静力学与动力学模型，并通过ANSYS Workbench软件分析微夹持器的位移放大比、固有频率和输出耦合比。最后搭建实验测试系统验证微夹持器的开环性能。实验结果表明：微夹持器x、y向的位移放大比分别为30.8和8.6，一阶固有频率为123.3 Hz。当施加10 μm输入位移时，微夹持器x、y向的工作行程为0 ～ 616.6 μm和0 ～ 51.0 μm，夹持力范围为0 ～ 25.8 mN。微夹持器x、y向位移放大比与一阶固有频率的实验测试和仿真数值之间的相对误差分别为17.9%、19.8%、13.9%，实验结果验证了理论模型和仿真分析的可行性。
Abstract
Aiming at the performance requirements of microgrippers with high displacement amplification ratio, multiple degrees of freedom and translational clamping in the fields of micro-operation and micro-assembly, a double-leaf bridge mechanism and parallelogram mechanism are used to design a piezoelectric compliant x-y microgripper. The statics and dynamics models of the microgripper are established through the finite-element method, and the displacement amplification ratio, the natural frequency, and the output coupling ratio of the microgripper are analyzed by ANSYS Workbench software. Finally, an experimental test system is built to verify the open-loop performances of the microgripper. Experimental results show that displacement amplification ratios of the microgripper in x- and y-directions are 30.8 and 8.6, and the first resonant frequency is 123.3 Hz. If an input displacement of 10 μm is applied, the operating ranges in x- and y-directions are 0 ~ 616.6 μm and 0 ~ 51.0 μm, and the gripping force range is 0 ~ 25.8 mN. The relative errors of the x- and y-direction displacement amplification ratio and the first resonant frequency between experimental tests and simulation values are 17.9%, 19.8%, and 13.9%, respectively. Experimental results verify the feasibility of the theoretical model and simulation analysis.
关键词
微夹持器 /
柔顺机构 /
压电驱动 /
多自由度
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Key words
microgripper /
compliant mechanism /
piezoelectric actuation /
multiple degrees of freedom
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