梳齿倾斜角对多自由度微陀螺动态性能的影响

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振动与冲击 ›› 2022, Vol. 41 ›› Issue (5) : 221-227.

论文

张昆鹏1，2,3，郝淑英1，2,3，宋宇昊1，2,3，张琪昌4，5，冯晶晶1，2,3

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Effects of comb inclination angle on dynamic performance of multi-DOF micro-gyroscope

ZHANG Kunpeng1,2,3, HAO Shuying1,2,3, SONG Yuhao1,2,3, ZHANG Qichang4,5, FENG Jingjing1,2,

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摘要

为揭示由于刻蚀加工误差导致的梳齿倾斜角度对多自由度微陀螺动态性能的影响机理, 以一类四自由度静电驱动微机械陀螺为研究对象，分析了线性及静电力非线性工况下梳齿倾斜角度对微陀螺动力学特性的影响。研究结果表明，微陀螺在线性系统内工作时，梳齿倾斜角会导致微陀螺系统出现共振频率偏移，并造成灵敏度大幅下降，但对带宽基本没有影响。当在静电力非线性系统内工作时，梳齿倾斜角对系统响应有刚度硬化作用，可在一定程度上抵消静电力非线性的影响；硬化作用先随梳齿倾斜角的增加而增加，到达峰值后随刻蚀误差的增加而减小，即存在最佳梳齿倾斜角度以抵消静电力非线性的影响。上述研究成果为控制或利用刻蚀误差的影响提供了理论依据。

Abstract

In order to reveal the influence of inclination angle of comb caused by etching errors on the dynamic performance of multi-degree-of-freedom micro-gyroscope, a kind of four degrees-of-freedom micro-gyroscope with electrostatically driven was taken as the research object. The influence of inclination of comb on the dynamic characteristics of micro-gyroscope under linear and electrostatic nonlinear conditions was analyzed. The results show that the inclination of comb can lead to the offset of resonance frequency and decrease of the sensitivity in the micro-gyroscope system, when the micro-gyroscope works in the linear system. However, it has little impact on the bandwidth. When working in a nonlinear system with electrostatic force, inclination angle of the comb has a hardening stiffness effect on the system. It can counteract the influence of electrostatic nonlinearity in a certain extent, and the hardening effect increases with the increase of comb inclination angle. After reaching the peak value, it decreases with the increase of etching error, that is, there is a optimal comb inclination angle to counteract the influence of electrostatic nonlinearity. This research provides a theoretical basis for controlling or making use of the influence of etching errors.

导出引用

张昆鹏1，2,3，郝淑英1，2,3，宋宇昊1，2,3，张琪昌4，5，冯晶晶1，2,3. 梳齿倾斜角对多自由度微陀螺动态性能的影响[J]. 振动与冲击, 2022, 41(5): 221-227

ZHANG Kunpeng1,2,3, HAO Shuying1,2,3, SONG Yuhao1,2,3, ZHANG Qichang4,5, FENG Jingjing1,2,. Effects of comb inclination angle on dynamic performance of multi-DOF micro-gyroscope[J]. Journal of Vibration and Shock, 2022, 41(5): 221-227

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