直线超声电机驱动的精密运动平台的位移分辨率

王金鹏1，周宏平1，时运来2

Displacement Resolution Research of Precision Stage Driving by Linear Ultrasonic Motors

WANG Jin-peng 1 ZHOU Hong-ping 1 SHI Yun-lai2

振动与冲击 . 2015, (22): 178 -182 .