考虑边缘效应的MEMS梳齿谐振器的静动力学特性分析

马贺冲 1，张琪昌 1,陈涛 2，李磊 1

Static and dynamic characteristics of MEMS comb resonators considering fringe effect

ZHANG Qi-chang 1 MA He-chong 1 CHEN Tao 2 LI Lei 1

振动与冲击 . 2018, (13): 71 -77 .