压膜阻尼对原子力显微镜振动特性的影响研究

柳世华，魏征，孙岩，刘运鸿

Study on the influence of squeeze-film damping on the vibration characteristics of atomic force microscopy

LIU Shihua, WEI Zheng, SUN Yan, LIU Yunhong

振动与冲击 . 2020, (11): 177 -183 .