底座激振下检测微型叠层芯片共振频率

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振动与冲击 ›› 2012, Vol. 31 ›› Issue (7) : 153-157.

论文

底座激振下检测微型叠层芯片共振频率

韩雷, 严国政

作者信息 +

Resonant frequency measurement of micro stacked chip by using base excitation

Han Lei , Yan Guo-zheng

Author information +

文章历史 +

摘要

摘要：为测试微悬臂芯片的动态特性，建立了以压电陶瓷为激振底座的测试系统。采用白噪声、稳态正弦和快速正弦（啁啾信号）扫频方式激励微叠层悬臂芯片，由多普勒测振仪测试芯片动态响应。通过分析压电陶瓷阻抗变化与芯片动态响应，获得的频率对应于压电陶瓷激振器所激励叠层芯片的一阶共振频率，这可作为微结构和器件的动态分析的测试方案。

Abstract

Abstract：A piezo-actuator was used as a base excitation for dynamical characteristics of the micro stacked chip, and the white-noise,steady-state sinusoidal and fast sine sweep(chirp) excitations were used to excite the stacked chip.Vibration of chip was recorded by using a Laser Doppler Vibrometer(LDV). By analyzing the changes in impedance of actuator and the dynamic responses of chip,obtained frequency peak was good agreement with the characteristics of the first resonant frequency of the stacked chip. This provides a testing scheme for dynamical analysis of microstructures and microcomponents.

导出引用

韩雷;严国政. 底座激振下检测微型叠层芯片共振频率[J]. 振动与冲击, 2012, 31(7): 153-157

Han Lei; Yan Guo-zheng. Resonant frequency measurement of micro stacked chip by using base excitation[J]. Journal of Vibration and Shock, 2012, 31(7): 153-157