一种新型并联XYY微定位平台动力学建模及控制仿真

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振动与冲击 ›› 2012, Vol. 31 ›› Issue (8) : 130-135,.

论文

一种新型并联XYY微定位平台动力学建模及控制仿真

舒强1，2; 施宁平1 ; 饶学军1; 郭友明1，2

作者信息 +

Dynamic Modeling and Control Simulation for A Novel Parallel XYY Micro positioner，

shu qiang1,2; shi ning-ping1; rao xue-jun1; guo you-ming1,2

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文章历史 +

摘要

介绍了一种新型的压电陶瓷驱动的并联XYY结构微定位平台。该平台通过Y方向两个压电驱动器的实时校正，能够避免因加工装配误差引起的结构非对称性对平台运动直线度的影响。推导了微定位平台的动力学模型。通过引入过程噪声的数学模型增广LQG控制器，实现了微定位平台解耦和跟踪，仿真发现这种方法能够有效抑制窄带随机扰动，提高定位精度。

Abstract

A novel micro positioner based on piezo-electric actuators is designed. By the compensation of two piezo-electric actuators fixed along Y direction, bad influence of manufacturing and assembling error on displacement straightness of the positioner is greatly decreased. Dynamic model of the positioner is developed. A control strategy based on LQG(linear Quadratic Gaussian) controller augmented by model of noise from base structure is studied. Computer simulation indicate that motion of the positioner is decoupled and the positioner can well track reference input and work well with narrow-band stochastic interference from base structure greatly depressed.

导出引用

舒强;施宁平;饶学军;郭友明;. 一种新型并联XYY微定位平台动力学建模及控制仿真[J]. 振动与冲击, 2012, 31(8): 130-135,

shu qiang;shi ning-ping;rao xue-jun;guo you-ming;. Dynamic Modeling and Control Simulation for A Novel Parallel XYY Micro positioner，[J]. Journal of Vibration and Shock, 2012, 31(8): 130-135,