初应力对压电薄膜体声波谐振器厚度拉伸模态谐振特性的影响

黄德进;王骥;罗昕逸

振动与冲击 ›› 2013, Vol. 32 ›› Issue (10) : 146-148.

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振动与冲击 ›› 2013, Vol. 32 ›› Issue (10) : 146-148.
论文

初应力对压电薄膜体声波谐振器厚度拉伸模态谐振特性的影响

  • 黄德进,王骥,罗昕逸
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EFFECTS OF INITIAL STRESSES ON RESONANCE CHARACTERISTICS OF FILM BULK ACOUSTIC RESONATOR IN THICKNESS-EXTENSION MODE

  • Huang Dejin, Wang ji, Luo Xinyi
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摘要

本文研究了初应力对压电薄膜体声波谐振器(FBAR)厚度拉伸模态谐振特性的影响。利用含初应力压电材料的压电弹性基本方程,推导出理想FBAR在正弦激励电压作用下的振动方程。然后根据边界条件,求出问题的解。得到了串联和并联谐振频率,并给出了具体的数值算例,讨论了初应力对谐振频率、带宽和有效机电耦合系数的影响。所得结果对于提高和改善FBAR的性能有参考意义。

Abstract

This paper stduies the effects of initial stresses on resonance characteristics of Film Bulk Acoustic Resonator (FBAR) in thickness-extension mode. Based on the fundmental piezoelastic equations of piezoelectric material with initial stresses, the vibration equation of ideal FBAR under sines excitation voltage is derived. The solutions are then obtained by using of the boundary conditions. The series and parallel resonance frequency are listed, and the effects of initial stresses on resonance frequency, bandwidth, and effective electromechanical coupling coefficien are discussed. A numerical example is presented to show the effects. These results are very useful for the improvement of designing FBAR.

关键词

薄膜体声波谐振器 / 初应力 / 谐振频率 / 带宽 / 有效机电耦合系数

Key words

FBAR / initial stress / resonance frequency / bandwidth / effective electromechanical coupling coefficient

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黄德进;王骥;罗昕逸. 初应力对压电薄膜体声波谐振器厚度拉伸模态谐振特性的影响[J]. 振动与冲击, 2013, 32(10): 146-148
Huang Dejin;Wang ji;Luo Xinyi. EFFECTS OF INITIAL STRESSES ON RESONANCE CHARACTERISTICS OF FILM BULK ACOUSTIC RESONATOR IN THICKNESS-EXTENSION MODE[J]. Journal of Vibration and Shock, 2013, 32(10): 146-148

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