新型永磁隔振器的隔振性能分析与实验研究

李强;徐登峰;范新;刘昊

振动与冲击 ›› 2013, Vol. 32 ›› Issue (13) : 6-12.

PDF(2759 KB)
PDF(2759 KB)
振动与冲击 ›› 2013, Vol. 32 ›› Issue (13) : 6-12.
论文

新型永磁隔振器的隔振性能分析与实验研究

  • 李强1,2,徐登峰1,范新2,刘昊1
作者信息 +

Analysis and experiment of vibration isolation performance for a novel permanent magnet vibration isolator

  • LI Qiang1,2, XU Dengfeng1, Fan, Xin2 , LIU Hao1
Author information +
文章历史 +

摘要

在超精密加工、IC制造、光学、高端的物理及化学试验中,隔振器已经成了许多设备的一个关键部件,隔离来自地面和设备内部的振动。随着稀土永磁材料的迅速发展,永磁隔振器已成为国内外研究的热点之一。本文将采用环形永磁体提出了一种新构型的永磁隔振器;根据环形永磁体的磁力和刚度的解析模型对隔振器的隔振性能进行参数化分析,确定了该隔振器磁环的结构参数。作为新型永磁隔振器的试验研究,搭建了永磁隔振试验台,通过理论计算和试验证实了该磁浮隔振器在其最大承载能力时具有良好的低频隔振性能。

Abstract

Vibration isolator is a key component to suppress the undesirable vibration in optical experiments, semiconductor manufacturing and precise measurements. It can isolate disturbances which come from the mechanical device itself or the external source. With the rapid development of the significantly enhanced properties of rare-earth permanent magnets, research on the vibration isolator characterized by strongly magneto-elastic force has gained interest in recent years. More and more engineers and researchers are attracted to develop a type of novel magnetic suspension vibration isolator. Thus, this paper proposed the basic configuration of the permanent magnet vibration isolator. Then a parametric study for the isolator, based the analytical expression of the axial magnetic force and stiffness, is carried out. The size dimensions of the magnetic rings are determined. The vibration isolation performance of the isolator is analyzed. It is possible to realize low frequency vibration isolation when the isolator reaches the maximum load supporting capacity with the lowest axial stiffness in theory. Finally, as a case study for the permanent magnet vibration isolator, an isolator table is constructed. The dynamic characteristic of the isolator is calculated and tested, respectively. The results indicate there is good agreement between the calculation and the experiment. It demonstrates that the isolator can realize low frequency vibration isolation with maximum load bearing capacity.

关键词

环形永磁体 / 隔振器 / 固有频率

Key words

Ring-shaped permanent magnets / Vibration isolator / Natural frequency.

引用本文

导出引用
李强;徐登峰;范新;刘昊. 新型永磁隔振器的隔振性能分析与实验研究[J]. 振动与冲击, 2013, 32(13): 6-12
LI Qiang;XU Dengfeng;Fan;Xin;LIU Hao. Analysis and experiment of vibration isolation performance for a novel permanent magnet vibration isolator[J]. Journal of Vibration and Shock, 2013, 32(13): 6-12

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